Scanning Electron Microscopy and Focused Ion Beam

Zeiss Auriga

The Zeiss Auriga is a dual beam FIB with a field emission electron column for high resolution electron imaging and a Canion Ga+ column for precision ion beam milling.

Key Features

• Electron beam operation from 0.1 to 30keV
  
• Ion beam operation from 5 to 30keV
  
• Super eucentric stage
  
• Nano-manipulator for TEM sample prep
  
• Sequential cross sectioning for three dimensional image construction

Detectors

Everhardt-Thornley SE2 detector (for surface topography),
In-lens electron detector (for surface feature/texture analysis)
Backscattered electron detector
Scanning transmission electron detector