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Scanning Electron Microscopy and Focused Ion Beam

Zeiss Auriga

The Zeiss Auriga is a dual beam FIB with a field emission electron column for high resolution electron imaging and a Canion Ga+ column for precision ion beam milling.

Zeiss AurigaKey Features

  • Electron beam operation from 0.1 to 30keV
  • Ion beam operation from 5 to 30keV
  • Super eucentric stage
  • Nano-manipulator for TEM sample prep
  • Sequential cross sectioning for three dimensional image construction


Everhardt-Thornley SE2 detector (for surface topography),
In-lens electron detector (for surface feature/texture analysis)
Backscattered electron detector
Scanning transmission electron detector

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